Inventor

YOGEV SHAY

IL10 patents

⚠️ This page may combine multiple inventors who share the name “YOGEV SHAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVA LTD

6 patents

US11763181B2Sep 19, 2023

Metrology and process control for semiconductor manufacturing

NOVA LTD3 citations68

US11107738B2Aug 31, 2021

Layer detection for high aspect ratio etch control

NOVA LTD2 citations66

US12321102B2Jun 3, 2025

Machine and deep learning methods for spectra-based metrology and process control

NOVA LTD0 citations59

US11815819B2Nov 14, 2023

Machine and deep learning methods for spectra-based metrology and process control

NOVA LTD0 citations59

US12236364B2Feb 25, 2025

Metrology and process control for semiconductor manufacturing

NOVA LTD0 citations58

US11929291B2Mar 12, 2024

Layer detection for high aspect ratio etch control

NOVA LTD0 citations56

APPLIED MATERIALS ISRAEL LTD

2 patents

US12469124B2Nov 11, 2025

Machine learning based yield prediction

APPLIED MATERIALS ISRAEL LTD0 citations42

US12561793B2Feb 24, 2026

Machine learning based examination for process monitoring

APPLIED MATERIALS ISRAEL LTD0 citations41

NOVA MEASURING INSTR LTD

1 patent

US11093840B2Aug 17, 2021

Metrology and process control for semiconductor manufacturing

NOVA MEASURING INSTR LTD1 citations69

GLOBALFOUNDRIES INC

1 patent

US11300948B2Apr 12, 2022

Process control of semiconductor fabrication based on spectra quality metrics

GLOBALFOUNDRIES INC1 citations59