Inventor
FUJIMORI TSUKASA
JP14 patents
⚠️ This page may combine multiple inventors who share the name “FUJIMORI TSUKASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
11 patentsUS7402449B2Jul 22, 2008
Integrated micro electro-mechanical system and manufacturing method thereof
HITACHI LTD130 citations98
US7325457B2Feb 5, 2008
Sensor and sensor module
HITACHI LTD21 citations92
US7972886B2Jul 5, 2011
Method of manufacturing micro electro mechanical systems device
HITACHI LTD7 citations83
US7919814B2Apr 5, 2011
Semiconductor device with integrated circuit electrically connected to a MEMS sensor by a through-electrode
HITACHI LTD12 citations83
US7670861B2Mar 2, 2010
Controlling stress in MEMS structures
HITACHI LTD10 citations83
US7658109B2Feb 9, 2010
Inertial sensor and manufacturing method of the same
HITACHI LTD18 citations83
US11373673B2Jun 28, 2022
Sound inspection system and sound inspection method
HITACHI LTD0 citations60
US9590451B2Mar 7, 2017
Autonomous power supply system
HITACHI LTD1 citations52
US10979987B2Apr 13, 2021
Sensor system for collecting data using an encryption key
HITACHI LTD0 citations51
US10629065B2Apr 21, 2020
Wireless sensor terminal, wireless sensor system, and sensor data collection method
HITACHI LTD0 citations40
US10782167B2Sep 22, 2020
Detection device and detection method, and fluid control system
HITACHI LTD0 citations38