Inventor

BRODIE ALAN D

US26 patents

⚠️ This page may combine multiple inventors who share the name “BRODIE ALAN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BRODIE ALAN D

KLA TENCOR CORP

Position feedback for multi-beam particle detector

Sampling feedback system

Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy system

Reduced Coulomb interactions in a multi-beam column

Pillar-supported array of micro electron lenses

Multi-beam electron characterization tool with telecentric illumination

Digital pattern generator having charge drain coating

Defect inspection and review using transmissive current image of charged particle beam system

Apparatus and methods for electron beam lithography using array cathode

Compact high-voltage electron gun

KLA INSTR CORP

Inspecting optical masks with electron beam microscopy

Inspecting optical masks with electron beam microscopy

Electron beam inspection system and method

Electron beam inspection system and method

MULTIBEAM SYSTEMS INC

Multi-beam multi-column electron beam inspection system

Electron optics for multi-beam electron beam lithography tool

Multi-beam multi-column electron beam inspection system

KLA TENCOR TECH CORP

Method and apparatus for beam current fluctuation correction

Method and apparatus for aberration-insensitive electron beam imaging

KLA CORP

Arrayed column detector

Plasmonic photocathode emitters at ultraviolet and visible wavelengths

INTEGRATED CIRCUIT TESTING

High current density particle beam system

BRODIE ALAN D

Well-based dynamic pattern generator

(unassigned)

Proximity effect correction method through uniform removal of fraction of interior pixels

STANDIFORD KEITH

Electron beam lithography with linear column array and rotary stage

TONG WILLIAM M

Charge drain coating for electron-optical MEMS