Inventor
ZHANG QIANG Q
US5 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG QIANG Q”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS8963110B2Feb 24, 2015
Continuous generation of extreme ultraviolet light
KLA TENCOR CORP12 citations79
US9645093B2May 9, 2017
System and method for apodization in a semiconductor device inspection system
KLA TENCOR CORP3 citations69
US9176069B2Nov 3, 2015
System and method for apodization in a semiconductor device inspection system
KLA TENCOR CORP5 citations69
US11410830B1Aug 9, 2022
Defect inspection and review using transmissive current image of charged particle beam system
KLA TENCOR CORP0 citations47