Inventor

NIEKIEL MALTE FLORIAN

DE2 patents

Patents

2 patents

US11589169B2Feb 21, 2023

MEMS sound transducer

FRAUNHOFER GES FORSCHUNG4 citations68

US12209010B2Jan 28, 2025

MEMS and method of manufacturing the same

FRAUNHOFER GES FORSCHUNG0 citations56