Inventor
BRIGGS SCOTT
US5 patents
⚠️ This page may combine multiple inventors who share the name “BRIGGS SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS9673058B1Jun 6, 2017
Method for etching features in dielectric layers
LAM RES CORP24 citations92
US6930048B1Aug 16, 2005
Etching a metal hard mask for an integrated circuit structure
LAM RES CORP43 citations91
US11935730B2Mar 19, 2024
Systems and methods for cleaning an edge ring pocket
LAM RES CORP0 citations62
US7544521B1Jun 9, 2009
Negative bias critical dimension trim
LAM RES CORP0 citations50