Inventor

KOZAKEVICH FELIX LEIB

US18 patents

⚠️ This page may combine multiple inventors who share the name “KOZAKEVICH FELIX LEIB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOZAKEVICH FELIX LEIB

LAM RES CORP

Three or more states for achieving high aspect ratio dielectric etch

Systems and methods for optimizing power delivery to an electrode of a plasma chamber

Low frequency RF generator and associated electrostatic chuck

Uniformity control circuit for impedance match

Systems and methods for optimizing power delivery to an electrode of a plasma chamber

Active control of radial etch uniformity

Three or more states for achieving high aspect ratio dielectric etch

Systems and methods for use of low frequency harmonics in bias radiofrequency supply to control uniformity of plasma process results across substrate

RF magnetic field sensor for harmonic measurements and uniformity control

Systems and methods for optimizing power delivery to an electrode of a plasma chamber

Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system

Impedance match with an elongated RF strap

Systems and methods for cleaning an edge ring pocket

Systems and methods for controlling a plasma sheath characteristic

Electrostatic edge ring mounting system for substrate processing

Systems and methods for using binning to increase power during a low frequency cycle

MKS INSTR INC

High speed synchronization of plasma source/bias power delivery

High speed synchronization of plasma source/bias power delivery