Inventor

KOHYAMA TSUNEHITO

JP4 patents

Patents

4 patents

US12050184B2Jul 30, 2024

Mask inspection method and mask inspection apparatus

LASERTEC CORP0 citations59

US11353802B2Jun 7, 2022

Optical device, and method for preventing contamination of optical device

LASERTEC CORP0 citations58

US10706527B2Jul 7, 2020

Correction method, correction apparatus, and inspection apparatus

LASERTEC CORP1 citations56

US10539511B2Jan 21, 2020

Detection method, inspection method, detection apparatus, and inspection apparatus

LASERTEC CORP1 citations55