Inventor
HONSHO KAZUHIRO
JP7 patents
Patents
7 patentsUS10910247B2Feb 2, 2021
Substrate container, load port apparatus, and substrate treating apparatus
SCREEN HOLDINGS CO LTD3 citations71
US9576831B2Feb 21, 2017
Substrate container, a load port apparatus, and a substrate treating apparatus
SCREEN HOLDINGS CO LTD3 citations71
US12128451B2Oct 29, 2024
Substrate processing system and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US10115623B2Oct 30, 2018
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations49
US9947572B2Apr 17, 2018
Substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations49
US12080566B2Sep 3, 2024
Substrate treating apparatus and substrate treating method
SCREEN HOLDINGS CO LTD0 citations48
US10381249B2Aug 13, 2019
Substrate container, load port apparatus, and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations40