Inventor
GORDON ROY
US13 patents
⚠️ This page may combine multiple inventors who share the name “GORDON ROY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SENSARRAY CORP
4 patentsUS7151366B2Dec 19, 2006
Integrated process condition sensing wafer and data analysis system
SENSARRAY CORP54 citations95
US7135852B2Nov 14, 2006
Integrated process condition sensing wafer and data analysis system
SENSARRAY CORP79 citations95
US6325536B1Dec 4, 2001
Integrated wafer temperature sensors
SENSARRAY CORP108 citations95
US7149643B2Dec 12, 2006
Integrated process condition sensing wafer and data analysis system
SENSARRAY CORP15 citations91