Inventor
WALKER DAVID M
11 patents
⚠️ This page may combine multiple inventors who share the name “WALKER DAVID M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CONTROL DATA CORP
5 patentsUS4665315AMay 12, 1987
Method and apparatus for in-situ plasma cleaning of electron beam optical systems
CONTROL DATA CORP60 citations92
US4661203AApr 28, 1987
Low defect etching of patterns using plasma-stencil mask
CONTROL DATA CORP42 citations91
US4661709AApr 28, 1987
Modular all-electrostatic electron-optical column and assembly of said columns into an array and method of manufacture
CONTROL DATA CORP47 citations91
US4419580ADec 6, 1983
Electron beam array alignment means
CONTROL DATA CORP29 citations89
US4667108AMay 19, 1987
Impedance matched and thermally cooled deflection amplifiers for charged particle beam apparatus employing deflectors
CONTROL DATA CORP4 citations62