Inventor

SILVESTRI VICTOR J

US24 patents

⚠️ This page may combine multiple inventors who share the name “SILVESTRI VICTOR J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SILVESTRI VICTOR J

IBM

Method of producing a thin silicon-on-insulator layer

Interferometer for in situ measurement of thin film thickness changes

Method of making defect free silicon islands using SEG

Method of trench filling

Method for forming a void free isolation structure utilizing etch and refill techniques

Buried air dielectric isolation of silicon islands

Method of filling trenches with silicon and structures

Method and apparatus for real-time, in-situ endpoint detection and closed loop etch process control

In situ, non-destructive CVD surface monitor

Method and apparatus for real-time film surface detection for large area wafers

Transistor structure utilizing a deposited epitaxial base region

Isolated films using an air dielectric

Method of trench filling

Method of manufacturing a semiconductor device structure employing a multi-level epitaxial structure

Porous film heat transfer

Method for forming a void free isolation pattern and resulting structure

Selective epitaxial growth structure and isolation

Chemical vapor deposition of dielectric films containing Al, N, and Si

Selective epitaxial growth structure and isolation

Buried injector memory cell formed from vertical complementary bipolar transistor circuits and method of fabrication therefor

Method of fabricating buried injector memory cell formed from vertical complementary bipolar transistor circuits utilizing mono-poly deposition

Semiconductor device structure employing a multi-level epitaxial structure and method of manufacturing same

Fabrication of dielectrically isolated integrated circuit devices

BEYER KLAUS D

Planar void free isolation structure