P

Inventor

WU YING

US138 patents
⚠️ This page may combine multiple inventors who share the name “WU YING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

15 patents
US9583357B1Feb 28, 2017

Systems and methods for reverse pulsing

LAM RES CORP98 citations99
US9761459B2Sep 12, 2017

Systems and methods for reverse pulsing

LAM RES CORP93 citations98
US9991128B2Jun 5, 2018

Atomic layer etching in continuous plasma

LAM RES CORP26 citations93
US10224183B1Mar 5, 2019

Multi-level parameter and frequency pulsing with a low angular spread

LAM RES CORP12 citations92
US10573494B2Feb 25, 2020

Multi-level parameter and frequency pulsing with a low angular spread

LAM RES CORP8 citations84
US10304660B1May 28, 2019

Multi-level pulsing of DC and RF signals

LAM RES CORP5 citations84
US9824896B2Nov 21, 2017

Methods and systems for advanced ion control for etching processes

LAM RES CORP4 citations84
US11728136B2Aug 15, 2023

RF pulsing within pulsing for semiconductor RF plasma processing

LAM RES CORP2 citations73
US11462390B2Oct 4, 2022

Multi-level parameter and frequency pulsing with a low angular spread

LAM RES CORP2 citations73
US11342159B2May 24, 2022

RF pulsing within pulsing for semiconductor RF plasma processing

LAM RES CORP2 citations73
US11049693B2Jun 29, 2021

Systems and methods for achieving peak ion energy enhancement with a low angular spread

LAM RES CORP1 citations73
US10943789B2Mar 9, 2021

Methods and systems for advanced ion control for etching processes

LAM RES CORP2 citations73
US10679825B2Jun 9, 2020

Systems and methods for applying frequency and match tuning in a non-overlapping manner for processing substrate

LAM RES CORP3 citations73
US10672590B2Jun 2, 2020

Frequency tuning for a matchless plasma source

LAM RES CORP3 citations73
US10580618B2Mar 3, 2020

Multi-level pulsing of DC and RF signals

LAM RES CORP4 citations73

DU PONT

6 patents

MILLENNIUM CELL INC

5 patents

3COM CORP

3 patents

WU YING

3 patents

MICROSOFT CORP

2 patents

LONG MAOLIN

2 patents

SWINGBYTE INC

1 patent

CHANG SHA X

1 patent

AIR PROD & CHEM

1 patent

LIU MIN

1 patent

TSUI YIP SUM

1 patent

IKANOS COMMUNICATIONS INC

1 patent

BUSINESS OBJECTS SOFTWARE LTD

1 patent

DAI SHENGYANG

1 patent

OMRON TATEISI ELECTRONICS CO

1 patent

(unassigned)

1 patent

UNIV JIANGSU

1 patent

HUAWEI TECH CO LTD

1 patent

CHONGQING GKTSINGCHIP INDUSTRY TECH CO LTD

1 patent

PILLARGO INC

1 patent

Showing the top 50 of 138 patents by PatentIndex Score.