Inventor
LANGLEY ROD C
US15 patents
⚠️ This page may combine multiple inventors who share the name “LANGLEY ROD C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
14 patentsUS5496773AMar 5, 1996
Semiconductor processing method of providing an electrically conductive interconnecting plug between an elevationally inner electrically conductive node and an elevationally outer electrically conductive node
MICRON TECHNOLOGY INC42 citations95
US5201993AApr 13, 1993
Anisotropic etch method
MICRON TECHNOLOGY INC33 citations95
US5169487ADec 8, 1992
Anisotropic etch method
MICRON TECHNOLOGY INC55 citations94
US5958801ASep 28, 1999
Anisotropic etch method
MICRON TECHNOLOGY INC19 citations92
US5817573AOct 6, 1998
Semiconductor processing method of providing an electrically conductive interconnecting plug between an elevationally inner electrically conductive node and an elevationally outer electrically conductive node
MICRON TECHNOLOGY INC18 citations92
US5094900AMar 10, 1992
Self-aligned sloped contact
MICRON TECHNOLOGY INC33 citations92
US4939105AJul 3, 1990
Planarizing contact etch
MICRON TECHNOLOGY INC29 citations92
US5380401AJan 10, 1995
Method to remove fluorine residues from bond pads
MICRON TECHNOLOGY INC74 citations90
US6133156AOct 17, 2000
Anisotropic etch method
MICRON TECHNOLOGY INC11 citations81
US5271799ADec 21, 1993
Anisotropic etch method
MICRON TECHNOLOGY INC20 citations81
US6686295B2Feb 3, 2004
Anisotropic etch method
MICRON TECHNOLOGY INC3 citations73
US5960314ASep 28, 1999
Semiconductor processing method of providing an electrically conductive interconnecting plug between an elevationally conductive node and an elevationally outer electrically conductive node
MICRON TECHNOLOGY INC7 citations73
US6461976B1Oct 8, 2002
Anisotropic etch method
MICRON TECHNOLOGY INC2 citations62
US7375036B2May 20, 2008
Anisotropic etch method
MICRON TECHNOLOGY INC0 citations51