Inventor
AIYER ARUN A
US13 patents
⚠️ This page may combine multiple inventors who share the name “AIYER ARUN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON PRECISION INC
4 patentsUS5453814ASep 26, 1995
Illumination source and method for microlithography
NIKON PRECISION INC110 citations97
US5729343AMar 17, 1998
Film thickness measurement apparatus with tilting stage and method of operation
NIKON PRECISION INC27 citations92
US5698069ADec 16, 1997
Technique for detecting particles on a wafer support surface
NIKON PRECISION INC20 citations92
US5648848AJul 15, 1997
Beam delivery apparatus and method for interferometry using rotatable polarization chucks
NIKON PRECISION INC10 citations73
NIKON CORP
4 patentsUS5859698AJan 12, 1999
Method and apparatus for macro defect detection using scattered light
NIKON CORP142 citations96
US5777729AJul 7, 1998
Wafer inspection method and apparatus using diffracted light
NIKON CORP86 citations95
US5838448ANov 17, 1998
CMP variable angle in situ sensor
NIKON CORP63 citations94
US7368206B2May 6, 2008
Automated overlay metrology system
NIKON CORP9 citations83
NIKON RES CORP OF AMERICA
4 patentsUS6248000B1Jun 19, 2001
Polishing pad thinning to optically access a semiconductor wafer surface
NIKON RES CORP OF AMERICA72 citations95
US6302770B1Oct 16, 2001
In-situ pad conditioning for CMP polisher
NIKON RES CORP OF AMERICA23 citations92
US6261152B1Jul 17, 2001
Heterdoyne Thickness Monitoring System
NIKON RES CORP OF AMERICA49 citations92
US6733370B2May 11, 2004
In-situ pad conditioning apparatus for CMP polisher
NIKON RES CORP OF AMERICA8 citations73