Inventor
CHAU HENRY K
US4 patents
⚠️ This page may combine multiple inventors who share the name “CHAU HENRY K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
3 patentsUS5859698AJan 12, 1999
Method and apparatus for macro defect detection using scattered light
NIKON CORP142 citations96
US5777729AJul 7, 1998
Wafer inspection method and apparatus using diffracted light
NIKON CORP86 citations95
US5838448ANov 17, 1998
CMP variable angle in situ sensor
NIKON CORP63 citations94