P

Inventor

ARNO JOSE I

US42 patents
⚠️ This page may combine multiple inventors who share the name “ARNO JOSE I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED TECH MATERIALS

27 patents
US6338312B2Jan 15, 2002

Integrated ion implant scrubber system

ADVANCED TECH MATERIALS52 citations96
US7063097B2Jun 20, 2006

In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration

ADVANCED TECH MATERIALS39 citations95
US6991671B2Jan 31, 2006

Rectangular parallelepiped fluid storage and dispensing vessel

ADVANCED TECH MATERIALS52 citations95
US7951225B2May 31, 2011

Fluid storage and dispensing systems, and fluid supply processes comprising same

ADVANCED TECH MATERIALS22 citations92
US7943204B2May 17, 2011

Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation

ADVANCED TECH MATERIALS20 citations92
US7325560B2Feb 5, 2008

In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration

ADVANCED TECH MATERIALS11 citations92
US7018448B2Mar 28, 2006

Gas cabinet including integrated effluent scrubber

ADVANCED TECH MATERIALS21 citations92
US6947138B2Sep 20, 2005

Optical sensor system and method for detection of hydrides and acid gases

ADVANCED TECH MATERIALS36 citations92
US6909973B2Jun 21, 2005

Photometrically modulated delivery of reagents

ADVANCED TECH MATERIALS17 citations92
US6841141B2Jan 11, 2005

System for in-situ generation of fluorine radicals and/or fluorine-containing interhalogen (XFn) compounds for use in cleaning semiconductor processing chambers

ADVANCED TECH MATERIALS36 citations92
US6576573B2Jun 10, 2003

Atmospheric pressure plasma enhanced abatement of semiconductor process effluent species

ADVANCED TECH MATERIALS24 citations92
US6540814B2Apr 1, 2003

Integrated ion implant scrubber system

ADVANCED TECH MATERIALS22 citations92
US7501010B2Mar 10, 2009

Rectangular parallelepiped fluid storage and dispending vessel

ADVANCED TECH MATERIALS18 citations91
US6759018B1Jul 6, 2004

Method for point-of-use treatment of effluent gas streams

ADVANCED TECH MATERIALS62 citations91
US7780747B2Aug 24, 2010

Apparatus and method for hydrogen generation from gaseous hydride

ADVANCED TECH MATERIALS10 citations84
US7129519B2Oct 31, 2006

Monitoring system comprising infrared thermopile detector

ADVANCED TECH MATERIALS11 citations84
US7058519B2Jun 6, 2006

Photometrically modulated delivery of reagents

ADVANCED TECH MATERIALS15 citations84
US7819981B2Oct 26, 2010

Methods for cleaning ion implanter components

ADVANCED TECH MATERIALS16 citations83
US8003391B2Aug 23, 2011

Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same

ADVANCED TECH MATERIALS8 citations82
US7972421B2Jul 5, 2011

Rectangular parallelepiped fluid storage and dispensing vessel

ADVANCED TECH MATERIALS7 citations82
US7723685B2May 25, 2010

Monitoring system comprising infrared thermopile detector

ADVANCED TECH MATERIALS5 citations74
US7711496B2May 4, 2010

Photometrically modulated delivery of reagents

ADVANCED TECH MATERIALS4 citations74
US7373257B2May 13, 2008

Photometrically modulated delivery of reagents

ADVANCED TECH MATERIALS8 citations74
US7351976B2Apr 1, 2008

Monitoring system comprising infrared thermopile detector

ADVANCED TECH MATERIALS8 citations74
US7253002B2Aug 7, 2007

Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same

ADVANCED TECH MATERIALS7 citations71
US9666435B2May 30, 2017

Apparatus and process for integrated gas blending

ADVANCED TECH MATERIALS4 citations69
US7925450B2Apr 12, 2011

Photometrically modulated delivery of reagents

ADVANCED TECH MATERIALS2 citations63

ENTEGRIS INC

4 patents

OLANDER W KARL

2 patents

ARNO JOSE I

2 patents

CLEARY JOHN M

1 patent

ADVANCED TECHNOLOGY AND MATERI

1 patent

(unassigned)

1 patent

BRESTOVANSKY DENNIS

1 patent

MOROCO JUDITH A

1 patent

CARRUTHERS J DONALD

1 patent

MARGANSKI PAUL J

1 patent