Inventor
ARNO JOSE I
US42 patents
⚠️ This page may combine multiple inventors who share the name “ARNO JOSE I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
27 patentsUS6338312B2Jan 15, 2002
Integrated ion implant scrubber system
ADVANCED TECH MATERIALS52 citations96
US7063097B2Jun 20, 2006
In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
ADVANCED TECH MATERIALS39 citations95
US6991671B2Jan 31, 2006
Rectangular parallelepiped fluid storage and dispensing vessel
ADVANCED TECH MATERIALS52 citations95
US7951225B2May 31, 2011
Fluid storage and dispensing systems, and fluid supply processes comprising same
ADVANCED TECH MATERIALS22 citations92
US7943204B2May 17, 2011
Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
ADVANCED TECH MATERIALS20 citations92
US7325560B2Feb 5, 2008
In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
ADVANCED TECH MATERIALS11 citations92
US7018448B2Mar 28, 2006
Gas cabinet including integrated effluent scrubber
ADVANCED TECH MATERIALS21 citations92
US6947138B2Sep 20, 2005
Optical sensor system and method for detection of hydrides and acid gases
ADVANCED TECH MATERIALS36 citations92
US6909973B2Jun 21, 2005
Photometrically modulated delivery of reagents
ADVANCED TECH MATERIALS17 citations92
US6841141B2Jan 11, 2005
System for in-situ generation of fluorine radicals and/or fluorine-containing interhalogen (XFn) compounds for use in cleaning semiconductor processing chambers
ADVANCED TECH MATERIALS36 citations92
US6576573B2Jun 10, 2003
Atmospheric pressure plasma enhanced abatement of semiconductor process effluent species
ADVANCED TECH MATERIALS24 citations92
US6540814B2Apr 1, 2003
Integrated ion implant scrubber system
ADVANCED TECH MATERIALS22 citations92
US7501010B2Mar 10, 2009
Rectangular parallelepiped fluid storage and dispending vessel
ADVANCED TECH MATERIALS18 citations91
US6759018B1Jul 6, 2004
Method for point-of-use treatment of effluent gas streams
ADVANCED TECH MATERIALS62 citations91
US7780747B2Aug 24, 2010
Apparatus and method for hydrogen generation from gaseous hydride
ADVANCED TECH MATERIALS10 citations84
US7129519B2Oct 31, 2006
Monitoring system comprising infrared thermopile detector
ADVANCED TECH MATERIALS11 citations84
US7058519B2Jun 6, 2006
Photometrically modulated delivery of reagents
ADVANCED TECH MATERIALS15 citations84
US7819981B2Oct 26, 2010
Methods for cleaning ion implanter components
ADVANCED TECH MATERIALS16 citations83
US8003391B2Aug 23, 2011
Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same
ADVANCED TECH MATERIALS8 citations82
US7972421B2Jul 5, 2011
Rectangular parallelepiped fluid storage and dispensing vessel
ADVANCED TECH MATERIALS7 citations82
US7723685B2May 25, 2010
Monitoring system comprising infrared thermopile detector
ADVANCED TECH MATERIALS5 citations74
US7711496B2May 4, 2010
Photometrically modulated delivery of reagents
ADVANCED TECH MATERIALS4 citations74
US7373257B2May 13, 2008
Photometrically modulated delivery of reagents
ADVANCED TECH MATERIALS8 citations74
US7351976B2Apr 1, 2008
Monitoring system comprising infrared thermopile detector
ADVANCED TECH MATERIALS8 citations74
US7253002B2Aug 7, 2007
Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same
ADVANCED TECH MATERIALS7 citations71
US9666435B2May 30, 2017
Apparatus and process for integrated gas blending
ADVANCED TECH MATERIALS4 citations69
US7925450B2Apr 12, 2011
Photometrically modulated delivery of reagents
ADVANCED TECH MATERIALS2 citations63
ENTEGRIS INC
4 patentsUS10895010B2Jan 19, 2021
Solid precursor-based delivery of fluid utilizing controlled solids morphology
ENTEGRIS INC5 citations72
US9455147B2Sep 27, 2016
Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
ENTEGRIS INC0 citations52
US9636626B2May 2, 2017
Rectangular parallelepiped fluid storage and dispensing vessel
ENTEGRIS INC0 citations51
US9132412B2Sep 15, 2015
Component for solar adsorption refrigeration system and method of making such component
ENTEGRIS INC0 citations51
OLANDER W KARL
2 patentsUS8389068B2Mar 5, 2013
Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
OLANDER W KARL8 citations83
US8282023B2Oct 9, 2012
Fluid storage and dispensing systems, and fluid supply processes comprising same
OLANDER W KARL10 citations83