Inventor
HOVINEN MINNA
US11 patents
⚠️ This page may combine multiple inventors who share the name “HOVINEN MINNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
7 patentsUS6671047B2Dec 30, 2003
Combination thermal wave and optical spectroscopy measurement systems
THERMA WAVE INC22 citations92
US6535285B1Mar 18, 2003
Combination thermal wave and optical spectroscopy measurement system
THERMA WAVE INC25 citations92
US6532070B1Mar 11, 2003
Method for determining ion concentration and energy of shallow junction implants
THERMA WAVE INC26 citations92
US6963401B2Nov 8, 2005
Combination thermal wave and optical spectroscopy measurement systems
THERMA WAVE INC12 citations83
US7099007B2Aug 29, 2006
Method for determining ion concentration and energy of shallow junction implants
THERMA WAVE INC3 citations62
US6859281B2Feb 22, 2005
Method for determining ion concentration and energy of shallow junction implants
THERMA WAVE INC2 citations62
US6665071B2Dec 16, 2003
Method for determining ion concentration and energy of shallow junction implants
THERMA WAVE INC3 citations62