Inventor
KOMINO MITSUAKI
JP25 patents
Patents
25 patentsUS6264788B1Jul 24, 2001
Plasma treatment method and apparatus
TOKYO ELECTRON LTD125 citations99
US6156151ADec 5, 2000
Plasma processing apparatus
TOKYO ELECTRON LTD498 citations99
US5769952AJun 23, 1998
Reduced pressure and normal pressure treatment apparatus
TOKYO ELECTRON LTD545 citations99
US5584971ADec 17, 1996
Treatment apparatus control method
TOKYO ELECTRON LTD127 citations99
US5575853ANov 19, 1996
Vacuum exhaust system for processing apparatus
TOKYO ELECTRON LTD210 citations99
US6544380B2Apr 8, 2003
Plasma treatment method and apparatus
TOKYO ELECTRON LTD104 citations98
US6134807AOct 24, 2000
Drying processing method and apparatus using same
TOKYO ELECTRON LTD557 citations98
US5665166ASep 9, 1997
Plasma processing apparatus
TOKYO ELECTRON LTD190 citations98
US5567267AOct 22, 1996
Method of controlling temperature of susceptor
TOKYO ELECTRON LTD261 citations98
US5478429ADec 26, 1995
Plasma process apparatus
TOKYO ELECTRON LTD473 citations98
US5382311AJan 17, 1995
Stage having electrostatic chuck and plasma processing apparatus using same
TOKYO ELECTRON LTD1,031 citations98
US5376213ADec 27, 1994
Plasma processing apparatus
TOKYO ELECTRON LTD181 citations98
US7337745B1Mar 4, 2008
Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor
TOKYO ELECTRON LTD83 citations97
US7033444B1Apr 25, 2006
Plasma processing apparatus, and electrode structure and table structure of processing apparatus
TOKYO ELECTRON LTD129 citations97
US5625526AApr 29, 1997
Electrostatic chuck
TOKYO ELECTRON LTD193 citations97
US6634845B1Oct 21, 2003
Transfer module and cluster system for semiconductor manufacturing process
TOKYO ELECTRON LTD71 citations96
US6431115B2Aug 13, 2002
Plasma treatment method and apparatus
TOKYO ELECTRON LTD27 citations96
US6106737AAug 22, 2000
Plasma treatment method utilizing an amplitude-modulated high frequency power
TOKYO ELECTRON LTD66 citations96
US5581874ADec 10, 1996
Method of forming a bonding portion
TOKYO ELECTRON LTD99 citations96
US5753891AMay 19, 1998
Treatment apparatus
TOKYO ELECTRON LTD74 citations95
US6379756B2Apr 30, 2002
Plasma treatment method and apparatus
TOKYO ELECTRON LTD15 citations92
US6167323ADec 26, 2000
Method and system for controlling gas system
TOKYO ELECTRON LTD23 citations92
US6157774ADec 5, 2000
Vapor generating method and apparatus using same
TOKYO ELECTRON LTD36 citations92
US6131307AOct 17, 2000
Method and device for controlling pressure and flow rate
TOKYO ELECTRON LTD23 citations92
US5660740AAug 26, 1997
Treatment apparatus control method
TOKYO ELECTRON LTD42 citations92