Inventor
TSUBOI KYO
JP7 patents
Patents
7 patentsUS7033444B1Apr 25, 2006
Plasma processing apparatus, and electrode structure and table structure of processing apparatus
TOKYO ELECTRON LTD129 citations97
US5956837ASep 28, 1999
Method of detaching object to be processed from electrostatic chuck
TOKYO ELECTRON LTD44 citations89
US11538668B2Dec 27, 2022
Mounting stage, substrate processing device, and edge ring
TOKYO ELECTRON LTD2 citations72
US7554095B2Jun 30, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate
TOKYO ELECTRON LTD7 citations71
US7521687B2Apr 21, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
TOKYO ELECTRON LTD5 citations71
US7550739B2Jun 23, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
TOKYO ELECTRON LTD0 citations50
US11715630B2Aug 1, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations45