Inventor
NAKANO RYU
JP31 patents
⚠️ This page may combine multiple inventors who share the name “NAKANO RYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
16 patentsUS9464352B2Oct 11, 2016
Low-oxidation plasma-assisted process
ASM IP HOLDING BV463 citations99
US9284642B2Mar 15, 2016
Method for forming oxide film by plasma-assisted processing
ASM IP HOLDING BV475 citations99
US9123510B2Sep 1, 2015
Method for controlling in-plane uniformity of substrate processed by plasma-assisted process
ASM IP HOLDING BV520 citations99
US9663857B2May 30, 2017
Method for stabilizing reaction chamber pressure
ASM IP HOLDING BV466 citations98
US10043661B2Aug 7, 2018
Method for protecting layer by forming hydrocarbon-based extremely thin film
ASM IP HOLDING BV463 citations96
US9343308B2May 17, 2016
Method for trimming carbon-containing film at reduced trimming rate
ASM IP HOLDING BV463 citations96
US11482418B2Oct 25, 2022
Substrate processing method and apparatus
ASM IP HOLDING BV4 citations73
US9673092B2Jun 6, 2017
Film forming apparatus, and method of manufacturing semiconductor device
ASM IP HOLDING BV2 citations73
US11830738B2Nov 28, 2023
Method for forming barrier layer and method for manufacturing semiconductor device
ASM IP HOLDING BV1 citations62
US12033849B2Jul 9, 2024
Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane
ASM IP HOLDING BV0 citations60
US11527400B2Dec 13, 2022
Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane
ASM IP HOLDING BV1 citations60
US12074022B2Aug 27, 2024
Method and system for forming patterned structures using multiple patterning process
ASM IP HOLDING BV0 citations58
US12394626B2Aug 19, 2025
Method of forming a structure and system for same
ASM IP HOLDING BV0 citations56
US12590364B2Mar 31, 2026
Cyclical deposition methods
ASM IP HOLDING BV0 citations55
US11970769B2Apr 30, 2024
Cyclical deposition methods
ASM IP HOLDING BV1 citations55
US12442082B2Oct 14, 2025
Reactor system comprising a tuning circuit
ASM IP HOLDING BV0 citations50
ASM INT NV
6 patentsUS10147600B2Dec 4, 2018
Methods for forming doped silicon oxide thin films
ASM INT NV417 citations99
US9875893B2Jan 23, 2018
Methods for forming doped silicon oxide thin films
ASM INT NV419 citations99
US9564314B2Feb 7, 2017
Methods for forming doped silicon oxide thin films
ASM INT NV465 citations99
US10510530B2Dec 17, 2019
Methods for forming doped silicon oxide thin films
ASM INT NV3 citations84
US11302527B2Apr 12, 2022
Methods for forming doped silicon oxide thin films
ASM INT NV1 citations73
US10784105B2Sep 22, 2020
Methods for forming doped silicon oxide thin films
ASM INT NV2 citations73
ASM JAPAN
4 patentsUS7712435B2May 11, 2010
Plasma processing apparatus with insulated gas inlet pore
ASM JAPAN426 citations97
US7972961B2Jul 5, 2011
Purge step-controlled sequence of processing semiconductor wafers
ASM JAPAN5 citations63
US7037855B2May 2, 2006
Method of forming fluorine-doped low-dielectric-constant insulating film
ASM JAPAN3 citations61
US7829159B2Nov 9, 2010
Method of forming organosilicon oxide film and multilayer resist structure
ASM JAPAN0 citations42