Inventor
CHOI DONG-KYUN
JP5 patents
Patents
5 patentsUS6313047B2Nov 6, 2001
MOCVD method of tantalum oxide film
TOKYO ELECTRON LTD27 citations92
US7368384B2May 6, 2008
Film formation apparatus and method of using the same
TOKYO ELECTRON LTD4 citations61
US7084023B2Aug 1, 2006
Method of manufacturing semiconductor device, film-forming apparatus, and storage medium
TOKYO ELECTRON LTD5 citations61
US7041546B2May 9, 2006
Film forming method for depositing a plurality of high-k dielectric films
TOKYO ELECTRON LTD5 citations60
US7546840B2Jun 16, 2009
Method for cleaning reaction container and film deposition system
TOKYO ELECTRON LTD1 citations49