Inventor
UMEHARA TAKAHITO
JP10 patents
Patents
10 patentsUS10648076B2May 12, 2020
Cleaning method and film deposition apparatus executing the cleaning method for uniformly cleaning rotary table
TOKYO ELECTRON LTD1 citations61
US7229917B2Jun 12, 2007
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD3 citations60
US7041546B2May 9, 2006
Film forming method for depositing a plurality of high-k dielectric films
TOKYO ELECTRON LTD5 citations60
US9388496B2Jul 12, 2016
Method for depositing a film on a substrate, and film deposition apparatus
TOKYO ELECTRON LTD2 citations59
US10344382B2Jul 9, 2019
Film forming apparatus
TOKYO ELECTRON LTD1 citations56
US10975466B2Apr 13, 2021
Method of cleaning exhaust pipe
TOKYO ELECTRON LTD0 citations50
US11075076B2Jul 27, 2021
Method for manufacturing a semiconductor device and film deposition apparatus
TOKYO ELECTRON LTD0 citations49
US11214864B2Jan 4, 2022
Method for reducing metal contamination and film deposition apparatus
TOKYO ELECTRON LTD0 citations48
US7651733B2Jan 26, 2010
Method for forming a vapor phase growth film
TOKYO ELECTRON LTD0 citations41
US10151028B2Dec 11, 2018
Film deposition apparatus
TOKYO ELECTRON LTD0 citations40