Inventor
HARADA KATSUSHIGE
JP13 patents
⚠️ This page may combine multiple inventors who share the name “HARADA KATSUSHIGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS8896097B2Nov 25, 2014
Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor
TOKYO ELECTRON LTD16 citations83
US9293543B2Mar 22, 2016
Film forming method and film forming apparatus
TOKYO ELECTRON LTD5 citations72
US7968472B2Jun 28, 2011
Film forming method and film forming apparatus
TOKYO ELECTRON LTD5 citations62
US7368384B2May 6, 2008
Film formation apparatus and method of using the same
TOKYO ELECTRON LTD4 citations61
US11486043B2Nov 1, 2022
Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor
TOKYO ELECTRON LTD0 citations60
US9234275B2Jan 12, 2016
Method and apparatus of forming metal compound film, and electronic product
TOKYO ELECTRON LTD2 citations60
US7041546B2May 9, 2006
Film forming method for depositing a plurality of high-k dielectric films
TOKYO ELECTRON LTD5 citations60
US9574269B2Feb 21, 2017
Method and apparatus for forming thin film
TOKYO ELECTRON LTD1 citations51