Inventor
SPEE CAROLUS IDA MARIA ANTONIU
NL4 patents
Patents
4 patentsUS7414700B2Aug 19, 2008
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
ASML NETHERLANDS BV16 citations92
US7355672B2Apr 8, 2008
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
ASML NETHERLANDS BV16 citations92
US7450217B2Nov 11, 2008
Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV16 citations89
US7075617B2Jul 11, 2006
Device manufacturing method and a lithographic apparatus
ASML NETHERLANDS BV0 citations50