Inventor
SHINOHARA KIBATSU
JP30 patents
⚠️ This page may combine multiple inventors who share the name “SHINOHARA KIBATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIHON KOSHUHA CO LTD
8 patentsUS7102110B2Sep 5, 2006
Magnetron oscillating apparatus
NIHON KOSHUHA CO LTD16 citations83
US6910440B2Jun 28, 2005
Apparatus for plasma processing
NIHON KOSHUHA CO LTD16 citations83
US5448173ASep 5, 1995
Triple-probe plasma measuring apparatus for correcting space potential errors
NIHON KOSHUHA CO LTD16 citations71
US5041803AAug 20, 1991
Automatic load matching circuit for microwaves using multi-element matching device
NIHON KOSHUHA CO LTD8 citations70
US9419323B2Aug 16, 2016
Power combiner/divider of a radial line type impedance matched between a center connector and peripheral outer connectors
NIHON KOSHUHA CO LTD4 citations64
US7545226B2Jun 9, 2009
Magnetron oscillator
NIHON KOSHUHA CO LTD3 citations62
US7186314B2Mar 6, 2007
Plasma processor and plasma processing method
NIHON KOSHUHA CO LTD5 citations62
US10056671B2Aug 21, 2018
Waveguide type power combining/dividing unit
NIHON KOSHUHA CO LTD2 citations60
TOKYO ELECTRON LTD
7 patentsUS5874706AFeb 23, 1999
Microwave plasma processing apparatus using a hybrid microwave having two different modes of oscillation or branched microwaves forming a concentric electric field
TOKYO ELECTRON LTD77 citations96
US5637961AJun 10, 1997
Concentric rings with different RF energies applied thereto
TOKYO ELECTRON LTD77 citations96
US6847003B2Jan 25, 2005
Plasma processing apparatus
TOKYO ELECTRON LTD22 citations92
US6657151B2Dec 2, 2003
Plasma processing device
TOKYO ELECTRON LTD10 citations74
US7296533B2Nov 20, 2007
Radial antenna and plasma device using it
TOKYO ELECTRON LTD5 citations63
US7395779B2Jul 8, 2008
Plasma processing apparatus
TOKYO ELECTRON LTD6 citations62
US7071442B2Jul 4, 2006
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations52
NEC CORP
4 patentsUS6043608AMar 28, 2000
Plasma processing apparatus
NEC CORP73 citations94
US5936352AAug 10, 1999
Plasma processing apparatus for producing plasma at low electron temperatures
NEC CORP20 citations92
US5900699AMay 4, 1999
Plasma generator with a shield interposing the antenna
NEC CORP49 citations92
US5565738AOct 15, 1996
Plasma processing apparatus which uses a uniquely shaped antenna to reduce the overall size of the apparatus with respect to the plasma chamber
NEC CORP53 citations90
KINUGAWA RUBBER IND
3 patentsUS5328348AJul 12, 1994
Control system for continuous vulcanization line for manufacturing sponge rubber product
KINUGAWA RUBBER IND3 citations62
US5542833AAug 6, 1996
Apparatus for continuously vulcanizing rubber product
KINUGAWA RUBBER IND4 citations61
US5385463AJan 31, 1995
Control system for continuous vulcanization line for manufacturing sponge rubber product
KINUGAWA RUBBER IND1 citations51