Inventor

KASAMA YOSHIKO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “KASAMA YOSHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC ELECTRONICS CORP

3 patents

US7138362B2Nov 21, 2006

Washing liquid composition for semiconductor substrate

NEC ELECTRONICS CORP23 citations92

US6890391B2May 10, 2005

Method of manufacturing semiconductor device and apparatus for cleaning substrate

NEC ELECTRONICS CORP33 citations92

US6949465B2Sep 27, 2005

Preparation process for semiconductor device

NEC ELECTRONICS CORP3 citations59

KANTO KAGAKU

2 patents

US7312186B2Dec 25, 2007

Cleaning solution for semiconductor substrate

KANTO KAGAKU19 citations92

US6787293B2Sep 7, 2004

Photoresist residue remover composition

KANTO KAGAKU15 citations82

NAKAYAMA TOMOO

1 patent

US8293653B2Oct 23, 2012

Method of manufacturing a semiconductor device

NAKAYAMA TOMOO0 citations43