Inventor
VAN DER NET ANTONIUS JOHANNES
NL9 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER NET ANTONIUS JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7057702B2Jun 6, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV89 citations96
US7113254B2Sep 26, 2006
Lithographic projection apparatus, gas purging method, device manufacturing method, and purge gas supply system
ASML NETHERLANDS BV15 citations89
US7476491B2Jan 13, 2009
Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV6 citations60
US7148949B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7450215B2Nov 11, 2008
Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system
ASML NETHERLANDS BV1 citations57
US7384149B2Jun 10, 2008
Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system
ASML NETHERLANDS BV3 citations56
US7227612B2Jun 5, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7446849B2Nov 4, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48