Inventor
VAN DER VEEN PAUL
NL25 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER VEEN PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
16 patentsUS6538716B2Mar 25, 2003
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV24 citations92
US6583855B2Jun 24, 2003
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV41 citations89
US6455862B1Sep 24, 2002
Lithographic projection apparatus
ASML NETHERLANDS BV51 citations87
US6989544B2Jan 24, 2006
Lithographic apparatus, device manufacturing method, device manufactured thereby, and computer program
ASML NETHERLANDS BV6 citations73
US9645510B2May 9, 2017
Method of controlling a radiation source and lithographic apparatus comprising the radiation source
ASML NETHERLANDS BV3 citations68
US6700646B2Mar 2, 2004
Lithographic apparatus, method of manufacturing a device, and device manufactured thereby
ASML NETHERLANDS BV4 citations63
US7368732B2May 6, 2008
Lithographic apparatus, device manufacturing method, device manufactured thereby, and computer program
ASML NETHERLANDS BV4 citations62
US7012265B2Mar 14, 2006
Lithographic apparatus, integrated circuit device manufacturing method, and integrated circuit device manufactured thereby
ASML NETHERLANDS BV6 citations62
US7508487B2Mar 24, 2009
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations60
US7476491B2Jan 13, 2009
Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV6 citations60
US10222703B2Mar 5, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US9778575B2Oct 3, 2017
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US7315351B2Jan 1, 2008
Lithographic apparatus, device manufacturing method and device manufactured therewith
ASML NETHERLANDS BV0 citations51
US7283208B2Oct 16, 2007
Lithographic apparatus, method of manufacturing a device, and device manufactured thereby
ASML NETHERLANDS BV0 citations50
US7297911B2Nov 20, 2007
Lithographic apparatus, illumination system, illumination controller and control method
ASML NETHERLANDS BV0 citations49
US6473163B2Oct 29, 2002
Fluorescence radiation filter
ASML NETHERLANDS BV0 citations46