Inventor

VAN DE VIJVER YURI JOHANNES GABRIEL

NL7 patents

⚠️ This page may combine multiple inventors who share the name “VAN DE VIJVER YURI JOHANNES GABRIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US7476491B2Jan 13, 2009

Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV6 citations60

US7446849B2Nov 4, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations48

US10310394B2Jun 4, 2019

Lithographic apparatus, a projection system and a device manufacturing method

ASML NETHERLANDS BV0 citations35

VAN DE VIJVER YURI JOHANNES GABRIEL

2 patents

US8115900B2Feb 14, 2012

Lithographic apparatus and device manufacturing method

VAN DE VIJVER YURI JOHANNES GABRIEL6 citations80

US8749756B2Jun 10, 2014

Lithographic apparatus and device manufacturing method

VAN DE VIJVER YURI JOHANNES GABRIEL0 citations48

VAN EMPEL TJARKO ADRIAAN RUDOLF

1 patent

US8094287B2Jan 10, 2012

Lithographic appararus and method

VAN EMPEL TJARKO ADRIAAN RUDOLF0 citations48

LABETSKI DZMITRY

1 patent

US8220315B2Jul 17, 2012

Gas gauge, lithographic apparatus and device manufacturing method

LABETSKI DZMITRY1 citations47