Inventor
KATO SHIGUMA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KATO SHIGUMA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
10 patentsUS10774420B2Sep 15, 2020
Flow passage structure and processing apparatus
TOSHIBA KK3 citations72
US10312113B2Jun 4, 2019
Flow passage structure, intake and exhaust member, and processing apparatus
TOSHIBA KK3 citations72
US10777395B2Sep 15, 2020
Processing apparatus and collimator
TOSHIBA KK4 citations70
US9586303B2Mar 7, 2017
Polishing device and method for polishing semiconductor wafer
TOSHIBA KK4 citations70
US10755904B2Aug 25, 2020
Processing apparatus and collimator
TOSHIBA KK0 citations51
US10147589B2Dec 4, 2018
Processing apparatus and collimator
TOSHIBA KK0 citations51
US9550273B2Jan 24, 2017
Polishing device and method of polishing semiconductor wafer
TOSHIBA KK0 citations46
US10844485B2Nov 24, 2020
Flow passage structure and processing apparatus
TOSHIBA KK0 citations41
US10220394B2Mar 5, 2019
Nozzle device and processing apparatus
TOSHIBA KK0 citations41
US10870913B2Dec 22, 2020
Processing device, sputtering device, and collimator
TOSHIBA KK0 citations39