Inventor
KAMAT VISHNU G
US5 patents
⚠️ This page may combine multiple inventors who share the name “KAMAT VISHNU G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SYNOPSYS INC
3 patentsUS7111276B2Sep 19, 2006
Correcting 3D effects in phase shifting masks using sub-resolution features
SYNOPSYS INC8 citations71
US8032845B2Oct 4, 2011
Correcting 3D effects in phase shifting masks using sub-resolution features
SYNOPSYS INC0 citations50
US7503030B2Mar 10, 2009
Correcting 3D effects in phase shifting masks using sub-resolution features
SYNOPSYS INC0 citations50