Inventor
MACHIDA SHUNTARO
JP48 patents
⚠️ This page may combine multiple inventors who share the name “MACHIDA SHUNTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
32 patentsUS7701110B2Apr 20, 2010
Ultrasonic transducer and manufacturing method thereof
HITACHI LTD60 citations98
US7045843B2May 16, 2006
Semiconductor device using MEMS switch
HITACHI LTD50 citations93
US7667374B2Feb 23, 2010
Ultrasonic transducer, ultrasonic probe and method for fabricating the same
HITACHI LTD31 citations92
US7512038B2Mar 31, 2009
Ultrasonic transducer and manufacturing method
HITACHI LTD15 citations92
US6479380B2Nov 12, 2002
Semiconductor device and manufacturing method thereof
HITACHI LTD36 citations92
US6680541B2Jan 20, 2004
Semiconductor device and process for producing the same
HITACHI LTD15 citations91
US6358838B2Mar 19, 2002
Semiconductor device and process for producing the same
HITACHI LTD27 citations91
US7923795B2Apr 12, 2011
Ultrasonic transducer device
HITACHI LTD10 citations84
US7860258B2Dec 28, 2010
Electro-acoustic transducer device
HITACHI LTD13 citations84
US7736985B2Jun 15, 2010
Method for manufacturing semiconductor device using overlapping exposure and semiconductor device thereof
HITACHI LTD13 citations84
US7451656B2Nov 18, 2008
Semiconductor device embedded with pressure sensor and manufacturing method thereof
HITACHI LTD13 citations84
US7270012B2Sep 18, 2007
Semiconductor device embedded with pressure sensor and manufacturing method thereof
HITACHI LTD13 citations84
US7675221B2Mar 9, 2010
Ultrasonic transducer and manufacturing method thereof
HITACHI LTD5 citations74
US6599830B2Jul 29, 2003
Semiconductor device and manufacturing method thereof
HITACHI LTD10 citations74
US10603689B2Mar 31, 2020
Ultrasonic transducer, method for making same, ultrasonic transducer array, and ultrasonic test apparatus
HITACHI LTD4 citations72
US7778113B2Aug 17, 2010
Ultrasonic transducer and manufacturing method thereof
HITACHI LTD6 citations63
US11502046B2Nov 15, 2022
Semiconductor chip
HITACHI LTD0 citations62
US11268937B2Mar 8, 2022
Capacitive micromachined ultrasonic transducer and ultrasonic imaging apparatus using the same
HITACHI LTD0 citations62
US10203688B2Feb 12, 2019
Manufacturing device, system and method for outputting a manufacturing process flow having the shortest total process time among a plurality of manufacturing process flows
HITACHI LTD1 citations62
US11904356B2Feb 20, 2024
Ultrasonic transducer, manufacturing method thereof, and ultrasonic imaging device
HITACHI LTD0 citations61
US7670858B2Mar 2, 2010
Semiconductor device and manufacturing method thereof
HITACHI LTD2 citations60
US7411260B2Aug 12, 2008
Semiconductor device and manufacturing method thereof
HITACHI LTD5 citations60
US11642695B2May 9, 2023
Ultrasonic probe and ultrasonic measurement apparatus using the same
HITACHI LTD0 citations52
US10605824B2Mar 31, 2020
MEMS manufacturing method and MEMS manufacturing apparatus
HITACHI LTD0 citations52
US10410826B2Sep 10, 2019
Device processing method and device processing apparatus
HITACHI LTD0 citations52
US11376628B2Jul 5, 2022
Capacitive device and piezoelectric device
HITACHI LTD0 citations51
US11331693B2May 17, 2022
Ultrasonic transducer array and ultrasonic probe
HITACHI LTD0 citations51
US10751027B2Aug 25, 2020
Ultrasound probe, performance evaluation method therefor, and ultrasound diagnostic equipment
HITACHI LTD0 citations51
US9964635B2May 8, 2018
Production method for ultrasonic probe, ultrasonic probe, and ultrasonic diagnosis device
HITACHI LTD0 citations51
US9873137B2Jan 23, 2018
Ultrasonic transducer, method of producing same, and ultrasonic probe using same
HITACHI LTD0 citations42
US10610890B2Apr 7, 2020
Ultrasonic transducer element, method of manufacturing the same, and ultrasonic image pickup device
HITACHI LTD0 citations41
US10336609B2Jul 2, 2019
Microstructure processing method and microstructure processing apparatus
HITACHI LTD0 citations40
MACHIDA SHUNTARO
7 patentsUS8617078B2Dec 31, 2013
Ultrasonic transducer and ultrasonic diagnostic device using same
MACHIDA SHUNTARO22 citations91
US8754489B2Jun 17, 2014
Ultrasonic transducer and manufacturing method
MACHIDA SHUNTARO2 citations62
US8294225B2Oct 23, 2012
Ultrasonic transducer and manufacturing method
MACHIDA SHUNTARO1 citations62
US8198782B2Jun 12, 2012
Ultrasonic transducer and manufacturing method thereof
MACHIDA SHUNTARO4 citations62
US9085012B2Jul 21, 2015
Ultrasonic transducer and ultrasonic diagnostic apparatus provided with same
MACHIDA SHUNTARO1 citations51
US8546894B2Oct 1, 2013
Capacitive micromachined ultrasonic transducer comprising electrode on flexible membrane
MACHIDA SHUNTARO0 citations51
US8106395B2Jan 31, 2012
Semiconductor device and method of manufacturing the same
MACHIDA SHUNTARO0 citations41