Inventor
OIKE HIROYUKI
JP4 patents
Patents
4 patentsUS9349601B2May 24, 2016
Ruthenium complex, method for producing same, and method for producing ruthenium-containing thin film
TOSOH CORP2 citations57
US12421259B2Sep 23, 2025
Titanium complex, method for producing same, and method for producing titanium-containing thin film
TOSOH CORP0 citations52
US11753429B2Sep 12, 2023
Cobalt complex, method for manufacturing same, and method for manufacturing cobalt-containing thin film
TOSOH CORP0 citations47
US10336782B2Jul 2, 2019
Substituted cyclopentadienyl cobalt complex and method for production thereof, and cobalt-containing thin film and method for production thereof
TOSOH CORP0 citations45