Inventor
LEE SONGJAE
KR9 patents
⚠️ This page may combine multiple inventors who share the name “LEE SONGJAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7418978B2Sep 2, 2008
Methods and apparatus for providing fluid to a semiconductor device processing apparatus
APPLIED MATERIALS INC22 citations90
US7297047B2Nov 20, 2007
Bubble suppressing flow controller with ultrasonic flow meter
APPLIED MATERIALS INC10 citations83
US11996307B2May 28, 2024
Semiconductor processing tool platform configuration with reduced footprint
APPLIED MATERIALS INC1 citations62
US12575377B2Mar 10, 2026
Method and tool for restricting substrate a support bead inside an opening formed in a substrate support
APPLIED MATERIALS INC0 citations42
US12334318B2Jun 17, 2025
Plasma preclean system for cluster tool
APPLIED MATERIALS INC0 citations42