Inventor
YASUMATSU YASUSHI
JP17 patents
Patents
17 patentsUS10879040B2Dec 29, 2020
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly
CANON ANELVA CORP2 citations71
US10062551B2Aug 28, 2018
Sputtering apparatus and substrate processing apparatus
CANON ANELVA CORP2 citations69
US9997339B2Jun 12, 2018
Sputtering apparatus and substrate processing apparatus
CANON ANELVA CORP2 citations69
US9322094B2Apr 26, 2016
Film-forming apparatus
CANON ANELVA CORP4 citations69
US12505979B2Dec 23, 2025
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly
CANON ANELVA CORP0 citations60
US12119203B2Oct 15, 2024
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly
CANON ANELVA CORP0 citations60
US11355314B2Jun 7, 2022
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly
CANON ANELVA CORP0 citations60
US9322095B2Apr 26, 2016
Film-forming apparatus
CANON ANELVA CORP2 citations59
US11694882B2Jul 4, 2023
Substrate processing apparatus and substrate processing method
CANON ANELVA CORP0 citations56
US11270873B2Mar 8, 2022
Substrate processing apparatus and substrate processing method
CANON ANELVA CORP0 citations56
US10224179B2Mar 5, 2019
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly
CANON ANELVA CORP0 citations50
US9721747B2Aug 1, 2017
Grid, method of manufacturing the same, and ion beam processing apparatus
CANON ANELVA CORP0 citations50
US9583304B2Feb 28, 2017
Processing apparatus and shield
CANON ANELVA CORP0 citations50
US10615012B2Apr 7, 2020
Sputtering apparatus and substrate processing apparatus
CANON ANELVA CORP0 citations48
US11508545B2Nov 22, 2022
Grid assembly and ion beam etching apparatus
CANON ANELVA CORP0 citations43
US9422619B2Aug 23, 2016
Processing apparatus and shield
CANON ANELVA CORP0 citations40
US9109285B2Aug 18, 2015
Film-forming apparatus
CANON ANELVA CORP0 citations38