Inventor
KINUTA Takafumi
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KINUTA Takafumi”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
4 patentsUS11211241B2Dec 28, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD4 citations71
US10792712B2Oct 6, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD6 citations71
US11901173B2Feb 13, 2024
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11260431B2Mar 1, 2022
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations61
MERCK PATENT GMBH
2 patentsUS12570935B2Mar 10, 2026
Substrate cleaning solution, and using the same, method for manufacturing cleaned substrate and method for manufacturing device
MERCK PATENT GMBH0 citations50
US12068150B2Aug 20, 2024
Substrate cleaning solution, and using the same, method for manufacturing cleaned substrate and method for manufacturing device
MERCK PATENT GMBH0 citations44