Inventor
JOHNSON ROGER M
US16 patents
⚠️ This page may combine multiple inventors who share the name “JOHNSON ROGER M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS9240308B2Jan 19, 2016
Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
APPLIED MATERIALS INC17 citations92
US9552967B2Jan 24, 2017
Abatement system having a plasma source
APPLIED MATERIALS INC7 citations83
US9230780B2Jan 5, 2016
Hall effect enhanced capacitively coupled plasma source
APPLIED MATERIALS INC14 citations83
US9754771B2Sep 5, 2017
Encapsulated magnetron
APPLIED MATERIALS INC6 citations73
US9543124B2Jan 10, 2017
Capacitively coupled plasma source for abating compounds produced in semiconductor processes
APPLIED MATERIALS INC4 citations72
US10153143B2Dec 11, 2018
Smart chamber and smart chamber components
APPLIED MATERIALS INC3 citations71
US11251067B2Feb 15, 2022
Pedestal lift for semiconductor processing chambers
APPLIED MATERIALS INC2 citations68
US11911869B2Feb 27, 2024
Chemical mechanical polishing system with platen temperature control
APPLIED MATERIALS INC0 citations61
US10930479B2Feb 23, 2021
Smart chamber and smart chamber components
APPLIED MATERIALS INC0 citations61
US10176973B2Jan 8, 2019
Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
APPLIED MATERIALS INC0 citations51
US11850700B2Dec 26, 2023
Sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems
APPLIED MATERIALS INC0 citations50
US11114285B2Sep 7, 2021
Apparatus for exhaust cooling
APPLIED MATERIALS INC0 citations48
PHOTO CONTROL CORP
3 patentsUS5812895ASep 22, 1998
Camera with negative identification system
PHOTO CONTROL CORP6 citations70
US5294950AMar 15, 1994
Identification system for automated film and order processing including machine and human readable code
PHOTO CONTROL CORP10 citations70
US5329325AJul 12, 1994
Synchronized zoom electronic camera system
PHOTO CONTROL CORP11 citations67