Inventor
YOON YONG-WOON
KR13 patents
⚠️ This page may combine multiple inventors who share the name “YOON YONG-WOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHEIL IND INC
4 patentsUS9725389B2Aug 8, 2017
Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition
CHEIL IND INC2 citations71
US9529257B2Dec 27, 2016
Hard mask composition and method for forming pattern using same
CHEIL IND INC1 citations51
US9823566B2Nov 21, 2017
Monomer, hardmask composition comprising monomer, and pattern forming method using hardmask composition
CHEIL IND INC0 citations50
US9513546B2Dec 6, 2016
Monomer, hard mask composition comprising said monomer, and method for forming pattern using said hard mask composition
CHEIL IND INC1 citations49
SAMSUNG SDI CO LTD
4 patentsUS10312074B2Jun 4, 2019
Method of producing layer structure, layer structure, and method of forming patterns
SAMSUNG SDI CO LTD2 citations68
US9683114B2Jun 20, 2017
Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition
SAMSUNG SDI CO LTD0 citations50
US11608471B2Mar 21, 2023
Composition for etching silicon nitride film and etching method using same
SAMSUNG SDI CO LTD0 citations49
US9371444B2Jun 21, 2016
Hardmask composition and method of forming patterns using the hardmask composition
SAMSUNG SDI CO LTD0 citations39
CHOI YOO-JEONG
2 patentsUS9665003B2May 30, 2017
Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns
CHOI YOO-JEONG3 citations68
US9359276B2Jun 7, 2016
Monomer for hardmask composition, hardmask composition including monomer, and pattern forming method using hardmask composition
CHOI YOO-JEONG1 citations49