Inventor
DING JUNHUA
US46 patents
⚠️ This page may combine multiple inventors who share the name “DING JUNHUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
33 patentsUS7474968B2Jan 6, 2009
Critical flow based mass flow verifier
MKS INSTR INC59 citations97
US7891228B2Feb 22, 2011
Dual-mode mass flow verification and mass flow delivery system and method
MKS INSTR INC56 citations96
US10031005B2Jul 24, 2018
Method and apparatus for self verification of pressure-based mass flow controllers
MKS INSTR INC20 citations94
US7706925B2Apr 27, 2010
Integrated pressure and flow ratio control system
MKS INSTR INC23 citations92
US7673645B2Mar 9, 2010
Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement
MKS INSTR INC31 citations92
US7467027B2Dec 16, 2008
Compensation for thermal siphoning in mass flow controllers
MKS INSTR INC29 citations92
US7461549B1Dec 9, 2008
Mass flow verifiers capable of providing different volumes, and related methods
MKS INSTR INC37 citations92
US7757554B2Jul 20, 2010
High accuracy mass flow verifier with multiple inlets
MKS INSTR INC20 citations91
US10606285B2Mar 31, 2020
System for and method of monitoring flow through mass flow controllers in real time
MKS INSTR INC8 citations84
US10649471B2May 12, 2020
Method and apparatus for pulse gas delivery with isolation valves
MKS INSTR INC7 citations83
US7621290B2Nov 24, 2009
Gas delivery method and system including a flow ratio controller using antisymmetric optimal control
MKS INSTR INC10 citations83
US10725484B2Jul 28, 2020
Method and apparatus for pulse gas delivery using an external pressure trigger
MKS INSTR INC5 citations82
US10031004B2Jul 24, 2018
Methods and apparatus for wide range mass flow verification
MKS INSTR INC9 citations82
US11404290B2Aug 2, 2022
Method and apparatus for pulse gas delivery
MKS INSTR INC2 citations73
US10801867B2Oct 13, 2020
Method and apparatus for self verification of pressured based mass flow controllers
MKS INSTR INC4 citations73
US10514712B2Dec 24, 2019
Method and apparatus for pressure-based flow measurement in non-critical flow conditions
MKS INSTR INC3 citations73
US7296465B2Nov 20, 2007
Vertical mount mass flow sensor
MKS INSTR INC9 citations73
US10126760B2Nov 13, 2018
System for and method of fast pulse gas delivery
MKS INSTR INC4 citations72
US9952078B2Apr 24, 2018
Upstream volume mass flow verification systems and methods
MKS INSTR INC4 citations72
US10698426B2Jun 30, 2020
Methods and apparatus for multiple channel mass flow and ratio control systems
MKS INSTR INC4 citations71
US12287655B2Apr 29, 2025
Method and apparatus for mass flow control
MKS INSTR INC1 citations64
US8386083B2Feb 26, 2013
Systems and methods for updating valve cracking current in mass flow controllers
MKS INSTR INC2 citations63
US12393209B2Aug 19, 2025
Methods and apparatus for reporting inlet pressure in mass flow controllers
MKS INSTR INC0 citations62
US12000723B2Jun 4, 2024
Method and apparatus for pressure based mass flow control
MKS INSTR INC1 citations62
US11187561B2Nov 30, 2021
Methods and apparatus for pressure based mass flow ratio control
MKS INSTR INC1 citations62
US10969799B2Apr 6, 2021
System for and method of fast pulse gas delivery
MKS INSTR INC1 citations62
US12360093B2Jul 15, 2025
Method and apparatus for pulse gas delivery with concentration measurement
MKS INSTR INC0 citations61
US11513542B2Nov 29, 2022
Method and apparatus for pulse gas delivery using an external pressure trigger
MKS INSTR INC0 citations60
US11573583B2Feb 7, 2023
Pressure control using an external trigger
MKS INSTR INC0 citations59
US11513108B2Nov 29, 2022
Method and apparatus for pulse gas delivery with concentration measurement
MKS INSTR INC1 citations55
US12264950B2Apr 1, 2025
Method and apparatus for mass flow verification
MKS INSTR INC0 citations52
US11940307B2Mar 26, 2024
Methods and apparatus for pressure based mass flow ratio control
MKS INSTR INC0 citations52
US12306160B2May 20, 2025
Binary gas purity analyzer
MKS INSTR INC0 citations45
DING JUNHUA
11 patentsUS8793082B2Jul 29, 2014
Upstream volume mass flow verification systems and methods
DING JUNHUA24 citations91
US10031531B2Jul 24, 2018
System for and method of multiple channel fast pulse gas delivery
DING JUNHUA14 citations84
US9557744B2Jan 31, 2017
System for and method of monitoring flow through mass flow controllers in real time
DING JUNHUA15 citations84
US8997686B2Apr 7, 2015
System for and method of fast pulse gas delivery
DING JUNHUA17 citations84
US8079383B2Dec 20, 2011
Controller gain scheduling for mass flow controllers
DING JUNHUA10 citations84
US9348339B2May 24, 2016
Method and apparatus for multiple-channel pulse gas delivery system
DING JUNHUA13 citations78
US9846074B2Dec 19, 2017
System for and method of monitoring flow through mass flow controllers in real time
DING JUNHUA5 citations73
US9127361B2Sep 8, 2015
Methods of and apparatus for controlling pressure in multiple zones of a process tool
DING JUNHUA4 citations73
US8849466B2Sep 30, 2014
Method of and apparatus for multiple channel flow ratio controller system
DING JUNHUA6 citations73
US10353408B2Jul 16, 2019
System for and method of fast pulse gas delivery
DING JUNHUA5 citations72
US9471066B2Oct 18, 2016
System for and method of providing pressure insensitive self verifying mass flow controller
DING JUNHUA6 citations72