Inventor
ZARKAR KAVEH H
US7 patents
Patents
7 patentsUS7706925B2Apr 27, 2010
Integrated pressure and flow ratio control system
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US7673645B2Mar 9, 2010
Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement
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US7467027B2Dec 16, 2008
Compensation for thermal siphoning in mass flow controllers
MKS INSTR INC29 citations92
US7461549B1Dec 9, 2008
Mass flow verifiers capable of providing different volumes, and related methods
MKS INSTR INC37 citations92
US7621290B2Nov 24, 2009
Gas delivery method and system including a flow ratio controller using antisymmetric optimal control
MKS INSTR INC10 citations83
US7296465B2Nov 20, 2007
Vertical mount mass flow sensor
MKS INSTR INC9 citations73
US9952078B2Apr 24, 2018
Upstream volume mass flow verification systems and methods
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