P

Inventor

KAMEDA KENJI

JP33 patents
⚠️ This page may combine multiple inventors who share the name “KAMEDA KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

10 patents
US9028648B1May 12, 2015

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC9 citations84
US9587308B2Mar 7, 2017

Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC2 citations72
US10156012B2Dec 18, 2018

Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC3 citations71
US9540727B2Jan 10, 2017

Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium

HITACHI INT ELECTRIC INC2 citations69
US11735412B2Aug 22, 2023

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC0 citations62
US10724137B2Jul 28, 2020

Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and cleaning completion determining method

HITACHI INT ELECTRIC INC1 citations62
US11001923B2May 11, 2021

Method of manufacturing semiconductor device and recording medium

HITACHI INT ELECTRIC INC0 citations51
US10176988B2Jan 8, 2019

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC0 citations50
US9976214B2May 22, 2018

Cleaning method and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations50
US9683288B2Jun 20, 2017

Method of manufacturing semiconductor device and method of cleaning processing vessel

HITACHI INT ELECTRIC INC1 citations48

KOKUSAI ELECTRIC CORP

7 patents

KAMEDA KENJI

4 patents

SONY CORP

3 patents

JAPAN AVIATION ELECTRONICS IND LTD

3 patents

AKAE NAONORI

1 patent

CENTRAL GLASS CO LTD

1 patent

NAT INST OF ADVANCED IND SCIEN

1 patent

OTSUKA PHARMA CO LTD

1 patent

NAKASHIMA SADAO

1 patent

SAKAI KATSUO

1 patent