Inventor
JENG ESTHER
US11 patents
⚠️ This page may combine multiple inventors who share the name “JENG ESTHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
7 patentsUS9653353B2May 16, 2017
Tungsten feature fill
NOVELLUS SYSTEMS INC50 citations98
US9240347B2Jan 19, 2016
Tungsten feature fill
NOVELLUS SYSTEMS INC72 citations98
US10256142B2Apr 9, 2019
Tungsten feature fill with nucleation inhibition
NOVELLUS SYSTEMS INC25 citations94
US10103058B2Oct 16, 2018
Tungsten feature fill
NOVELLUS SYSTEMS INC23 citations94
US11075115B2Jul 27, 2021
Tungsten feature fill
NOVELLUS SYSTEMS INC11 citations86
US11410883B2Aug 9, 2022
Tungsten feature fill with nucleation inhibition
NOVELLUS SYSTEMS INC5 citations84
US12444651B2Oct 14, 2025
Tungsten feature fill with nucleation inhibition
NOVELLUS SYSTEMS INC0 citations62