Inventor
WANG DEQI
US19 patents
⚠️ This page may combine multiple inventors who share the name “WANG DEQI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
8 patentsUS9653353B2May 16, 2017
Tungsten feature fill
NOVELLUS SYSTEMS INC50 citations98
US9240347B2Jan 19, 2016
Tungsten feature fill
NOVELLUS SYSTEMS INC72 citations98
US10256142B2Apr 9, 2019
Tungsten feature fill with nucleation inhibition
NOVELLUS SYSTEMS INC25 citations94
US10103058B2Oct 16, 2018
Tungsten feature fill
NOVELLUS SYSTEMS INC23 citations94
US9034760B2May 19, 2015
Methods of forming tensile tungsten films and compressive tungsten films
NOVELLUS SYSTEMS INC25 citations92
US11075115B2Jul 27, 2021
Tungsten feature fill
NOVELLUS SYSTEMS INC11 citations86
US11410883B2Aug 9, 2022
Tungsten feature fill with nucleation inhibition
NOVELLUS SYSTEMS INC5 citations84
US12444651B2Oct 14, 2025
Tungsten feature fill with nucleation inhibition
NOVELLUS SYSTEMS INC0 citations62
LAM RES CORP
8 patentsUS10170320B2Jan 1, 2019
Feature fill with multi-stage nucleation inhibition
LAM RES CORP20 citations94
US9997405B2Jun 12, 2018
Feature fill with nucleation inhibition
LAM RES CORP22 citations94
US10211099B2Feb 19, 2019
Chamber conditioning for remote plasma process
LAM RES CORP24 citations92
US10916434B2Feb 9, 2021
Feature fill with multi-stage nucleation inhibition
LAM RES CORP9 citations86
US10580654B2Mar 3, 2020
Feature fill with multi-stage nucleation inhibition
LAM RES CORP12 citations86
US10580695B2Mar 3, 2020
Feature fill with nucleation inhibition
LAM RES CORP13 citations86
US9589808B2Mar 7, 2017
Method for depositing extremely low resistivity tungsten
LAM RES CORP17 citations83
US11901227B2Feb 13, 2024
Feature fill with nucleation inhibition
LAM RES CORP3 citations75
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD
2 patentsUS11532685B2Dec 20, 2022
Doubled-side display device and manufacturing method thereof
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD0 citations52
US11315983B2Apr 26, 2022
Display panel including multiple pixel units and display device
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD0 citations52