P

Inventor

ZHOU JIANHUA

US110 patents
⚠️ This page may combine multiple inventors who share the name “ZHOU JIANHUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

30 patents
US10950477B2Mar 16, 2021

Ceramic heater and esc with enhanced wafer edge performance

APPLIED MATERIALS INC280 citations99
US9157730B2Oct 13, 2015

PECVD process

APPLIED MATERIALS INC49 citations97
US8772682B2Jul 8, 2014

Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber

APPLIED MATERIALS INC46 citations94
US9816187B2Nov 14, 2017

PECVD process

APPLIED MATERIALS INC8 citations92
US9458537B2Oct 4, 2016

PECVD process

APPLIED MATERIALS INC12 citations92
US10480074B2Nov 19, 2019

Apparatus for radical-based deposition of dielectric films

APPLIED MATERIALS INC15 citations85
US10793954B2Oct 6, 2020

PECVD process

APPLIED MATERIALS INC3 citations84
US10060032B2Aug 28, 2018

PECVD process

APPLIED MATERIALS INC3 citations84
US9725806B2Aug 8, 2017

Multi-zone pedestal for plasma processing

APPLIED MATERIALS INC7 citations84
US10403535B2Sep 3, 2019

Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system

APPLIED MATERIALS INC11 citations83
US11613812B2Mar 28, 2023

PECVD process

APPLIED MATERIALS INC2 citations73
US11299805B2Apr 12, 2022

Plasma corrision resistive heater for high temperature processing

APPLIED MATERIALS INC3 citations73
US10266943B2Apr 23, 2019

Plasma corrosion resistive heater for high temperature processing

APPLIED MATERIALS INC4 citations73
US10153185B2Dec 11, 2018

Substrate temperature measurement in multi-zone heater

APPLIED MATERIALS INC3 citations73
US10125422B2Nov 13, 2018

High impedance RF filter for heater with impedance tuning device

APPLIED MATERIALS INC4 citations73
US10128118B2Nov 13, 2018

Bottom and side plasma tuning having closed loop control

APPLIED MATERIALS INC2 citations73
US9975320B2May 22, 2018

Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater

APPLIED MATERIALS INC2 citations73
US9556507B2Jan 31, 2017

Yttria-based material coated chemical vapor deposition chamber heater

APPLIED MATERIALS INC4 citations73
US10692703B2Jun 23, 2020

Ceramic heater with enhanced RF power delivery

APPLIED MATERIALS INC2 citations72
US9840777B2Dec 12, 2017

Apparatus for radical-based deposition of dielectric films

APPLIED MATERIALS INC4 citations72
US9384950B2Jul 5, 2016

Chamber coatings

APPLIED MATERIALS INC4 citations72
US11031262B2Jun 8, 2021

Loadlock integrated bevel etcher system

APPLIED MATERIALS INC2 citations71
US10879041B2Dec 29, 2020

Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers

APPLIED MATERIALS INC4 citations71
US10697062B2Jun 30, 2020

Gas flow guide design for uniform flow distribution and efficient purge

APPLIED MATERIALS INC3 citations71
US10636684B2Apr 28, 2020

Loadlock integrated bevel etcher system

APPLIED MATERIALS INC1 citations71
US10403515B2Sep 3, 2019

Loadlock integrated bevel etcher system

APPLIED MATERIALS INC1 citations71
US10883174B2Jan 5, 2021

Gas diffuser mounting plate for reduced particle generation

APPLIED MATERIALS INC2 citations69
US10090187B2Oct 2, 2018

Multi-zone pedestal for plasma processing

APPLIED MATERIALS INC1 citations63
US7514125B2Apr 7, 2009

Methods to improve the in-film defectivity of PECVD amorphous carbon films

APPLIED MATERIALS INC2 citations63
US12394595B2Aug 19, 2025

Multi-antenna unit for large area inductively coupled plasma processing apparatus

APPLIED MATERIALS INC0 citations62

HUAWEI TECH CO LTD

5 patents

SHENZHEN SKYWORTH RGB ELECTRONICS CO LTD

2 patents

BALUJA SANJEEV

1 patent

ROCKET SOFTWARE INC

1 patent

SHAH ASHISH

1 patent

FORD MOTOR CO

1 patent

AMBAL HARI KISHORE

1 patent

YAP LIPYEOW

1 patent

PADHI DEENESH

1 patent

LITE ON ELECTRONICS GUANGZHOU LTD

1 patent

ZHOU JIANHUA

1 patent

HONEYWELL INT INC

1 patent

BRIGHAM & WOMENS HOSPITAL

1 patent

SANKARAKRISHNAN RAMPRAKASH

1 patent

HUANG YUANJUN

1 patent

Showing the top 50 of 110 patents by PatentIndex Score.