Inventor
ZHOU JIANHUA
US110 patents
⚠️ This page may combine multiple inventors who share the name “ZHOU JIANHUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
30 patentsUS10950477B2Mar 16, 2021
Ceramic heater and esc with enhanced wafer edge performance
APPLIED MATERIALS INC280 citations99
US9157730B2Oct 13, 2015
PECVD process
APPLIED MATERIALS INC49 citations97
US8772682B2Jul 8, 2014
Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber
APPLIED MATERIALS INC46 citations94
US9816187B2Nov 14, 2017
PECVD process
APPLIED MATERIALS INC8 citations92
US9458537B2Oct 4, 2016
PECVD process
APPLIED MATERIALS INC12 citations92
US10480074B2Nov 19, 2019
Apparatus for radical-based deposition of dielectric films
APPLIED MATERIALS INC15 citations85
US10793954B2Oct 6, 2020
PECVD process
APPLIED MATERIALS INC3 citations84
US10060032B2Aug 28, 2018
PECVD process
APPLIED MATERIALS INC3 citations84
US9725806B2Aug 8, 2017
Multi-zone pedestal for plasma processing
APPLIED MATERIALS INC7 citations84
US10403535B2Sep 3, 2019
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system
APPLIED MATERIALS INC11 citations83
US11613812B2Mar 28, 2023
PECVD process
APPLIED MATERIALS INC2 citations73
US11299805B2Apr 12, 2022
Plasma corrision resistive heater for high temperature processing
APPLIED MATERIALS INC3 citations73
US10266943B2Apr 23, 2019
Plasma corrosion resistive heater for high temperature processing
APPLIED MATERIALS INC4 citations73
US10153185B2Dec 11, 2018
Substrate temperature measurement in multi-zone heater
APPLIED MATERIALS INC3 citations73
US10125422B2Nov 13, 2018
High impedance RF filter for heater with impedance tuning device
APPLIED MATERIALS INC4 citations73
US10128118B2Nov 13, 2018
Bottom and side plasma tuning having closed loop control
APPLIED MATERIALS INC2 citations73
US9975320B2May 22, 2018
Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater
APPLIED MATERIALS INC2 citations73
US9556507B2Jan 31, 2017
Yttria-based material coated chemical vapor deposition chamber heater
APPLIED MATERIALS INC4 citations73
US10692703B2Jun 23, 2020
Ceramic heater with enhanced RF power delivery
APPLIED MATERIALS INC2 citations72
US9840777B2Dec 12, 2017
Apparatus for radical-based deposition of dielectric films
APPLIED MATERIALS INC4 citations72
US9384950B2Jul 5, 2016
Chamber coatings
APPLIED MATERIALS INC4 citations72
US11031262B2Jun 8, 2021
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC2 citations71
US10879041B2Dec 29, 2020
Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers
APPLIED MATERIALS INC4 citations71
US10697062B2Jun 30, 2020
Gas flow guide design for uniform flow distribution and efficient purge
APPLIED MATERIALS INC3 citations71
US10636684B2Apr 28, 2020
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US10403515B2Sep 3, 2019
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US10883174B2Jan 5, 2021
Gas diffuser mounting plate for reduced particle generation
APPLIED MATERIALS INC2 citations69
US10090187B2Oct 2, 2018
Multi-zone pedestal for plasma processing
APPLIED MATERIALS INC1 citations63
US7514125B2Apr 7, 2009
Methods to improve the in-film defectivity of PECVD amorphous carbon films
APPLIED MATERIALS INC2 citations63
US12394595B2Aug 19, 2025
Multi-antenna unit for large area inductively coupled plasma processing apparatus
APPLIED MATERIALS INC0 citations62
HUAWEI TECH CO LTD
5 patentsUS11880602B2Jan 23, 2024
Data writing method and storage device
HUAWEI TECH CO LTD2 citations73
US10310930B2Jun 4, 2019
Solid state disk using method and apparatus
HUAWEI TECH CO LTD2 citations73
US11200160B2Dec 14, 2021
Data processing method and apparatus, and flash device
HUAWEI TECH CO LTD2 citations72
US12229410B2Feb 18, 2025
Solid state drive management method and solid state drive
HUAWEI TECH CO LTD0 citations63
US12443371B2Oct 14, 2025
Data writing method and storage device
HUAWEI TECH CO LTD0 citations62
SHENZHEN SKYWORTH RGB ELECTRONICS CO LTD
2 patentsBALUJA SANJEEV
1 patentROCKET SOFTWARE INC
1 patentSHAH ASHISH
1 patentFORD MOTOR CO
1 patentAMBAL HARI KISHORE
1 patentYAP LIPYEOW
1 patentPADHI DEENESH
1 patentLITE ON ELECTRONICS GUANGZHOU LTD
1 patentZHOU JIANHUA
1 patentHONEYWELL INT INC
1 patentBRIGHAM & WOMENS HOSPITAL
1 patentSANKARAKRISHNAN RAMPRAKASH
1 patentHUANG YUANJUN
1 patentShowing the top 50 of 110 patents by PatentIndex Score.