Inventor
AYOUB MOHAMAD A
US23 patents
⚠️ This page may combine multiple inventors who share the name “AYOUB MOHAMAD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
19 patentsUS9466469B2Oct 11, 2016
Remote plasma source for controlling plasma skew
APPLIED MATERIALS INC121 citations97
US9157730B2Oct 13, 2015
PECVD process
APPLIED MATERIALS INC49 citations97
US9816187B2Nov 14, 2017
PECVD process
APPLIED MATERIALS INC8 citations92
US9458537B2Oct 4, 2016
PECVD process
APPLIED MATERIALS INC12 citations92
US10793954B2Oct 6, 2020
PECVD process
APPLIED MATERIALS INC3 citations84
US10060032B2Aug 28, 2018
PECVD process
APPLIED MATERIALS INC3 citations84
US10083818B2Sep 25, 2018
Auto frequency tuned remote plasma source
APPLIED MATERIALS INC8 citations83
US11613812B2Mar 28, 2023
PECVD process
APPLIED MATERIALS INC2 citations73
US10125422B2Nov 13, 2018
High impedance RF filter for heater with impedance tuning device
APPLIED MATERIALS INC4 citations73
US10128118B2Nov 13, 2018
Bottom and side plasma tuning having closed loop control
APPLIED MATERIALS INC2 citations73
US10032608B2Jul 24, 2018
Apparatus and method for tuning electrode impedance for high frequency radio frequency and terminating low frequency radio frequency to ground
APPLIED MATERIALS INC4 citations73
US9865431B2Jan 9, 2018
Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber
APPLIED MATERIALS INC5 citations73
US10347465B2Jul 9, 2019
Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber
APPLIED MATERIALS INC3 citations67
US9386680B2Jul 5, 2016
Detecting plasma arcs by monitoring RF reflected power in a plasma processing chamber
APPLIED MATERIALS INC4 citations67
US11898249B2Feb 13, 2024
PECVD process
APPLIED MATERIALS INC0 citations62
US10910227B2Feb 2, 2021
Bottom and side plasma tuning having closed loop control
APPLIED MATERIALS INC0 citations62
US10450653B2Oct 22, 2019
High impedance RF filter for heater with impedance tuning device
APPLIED MATERIALS INC1 citations62
US10030306B2Jul 24, 2018
PECVD apparatus and process
APPLIED MATERIALS INC1 citations62
US11136665B2Oct 5, 2021
Shadow ring for modifying wafer edge and bevel deposition
APPLIED MATERIALS INC1 citations61