Inventor
CHUNG WONWOONG
KR5 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG WONWOONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS10134583B2Nov 20, 2018
Methods of forming a low-k dielectric layer and methods of fabricating a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD3 citations70
US9460935B2Oct 4, 2016
Method for fabricating semiconductor devices
SAMSUNG ELECTRONICS CO LTD5 citations67
US10883173B2Jan 5, 2021
Gas storage cylinder, deposition system, and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations45
US12183591B2Dec 31, 2024
Etching gas compositions, methods of forming micropatterns, and methods of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations41