Inventor

Chung Kyong-Jae

KR2 patents

Patents

2 patents

US9899193B1Feb 20, 2018

RF ion source with dynamic volume control

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC8 citations79

US10134568B2Nov 20, 2018

RF ion source with dynamic volume control

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations47