Inventor
YONG POH BOON
US4 patents
Patents
4 patentsUS10204290B2Feb 12, 2019
Defect review sampling and normalization based on defect and design attributes
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US10133263B1Nov 20, 2018
Process condition based dynamic defect inspection
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US9277186B2Mar 1, 2016
Generating a wafer inspection process using bit failures and virtual inspection
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US10014229B2Jul 3, 2018
Generating a wafer inspection process using bit failures and virtual inspection
KLA TENCOR CORP0 citations44