Inventor
DE BEST JEROEN JOHANNES THEODORUS HENDRIKUS
NL3 patents
Patents
3 patentsUS10401743B2Sep 3, 2019
Control system, positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations67
US10095123B2Oct 9, 2018
Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program
ASML NETHERLANDS BV0 citations47
US10061213B2Aug 28, 2018
Sensor, object positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36